Hao Seal provides custom FKM and FFKM seals for PECVD, LPCVD, diffusion, oxidation, ALD, transfer chamber and HJT equipment. Material selection is based on actual temperature, process gas, vacuum level and sealing position.
From standard O-rings to rectangular, large-diameter and application-specific seals, we support drawing review, sample development and batch production for reliable sealing and reduced maintenance.
Where Our Seals Are Used in PV Manufacturing
Technical Requirements
1. High temperature resistance, long-term at250'C, with life up to 3000 hours;
2. Low compression set rate, high strength; suitable for vacuum sealing;
3. A small amount of acidic gas(corrosive);
4 .Special formulation of VITON-B sealingring, with high fluorine content, goodthermal conductivity, heat resistance, andcorrosion resistance, suitable for long-term use;
FULL RANGE PV SEALING SOLUTIONS
More than 15 years experiences in manufacturing
R&D special sealing materials suitable for the photovoltaic industry.
VITON-B materials and FFKM high-temperature-resistant
A large amount of allkinds sizes stocks can be delivered within 24hours
Advanced domestic production system with high production efficiency and cost reduction
PECVD/LPCVD Sealing Solutions
1. High temperature resistance, long-term at 250°C, with life up to 3000 hours;
2. Low compression set rate, high strength; suitable for vacuum sealing;
3. A small amount of acidic gas(corrosive);
4 .Special formulation of VITON-B sealing ring, with high fluorine content, good thermal conductivity, heat resistance, and corrosion resistance, suitable for long-term use;
Photovoltaic Equipment Seal Solution
The conversion efficiency of a photovoltaic (PV) cell, or solar cell, is the percentage of the solar energy shining on a PV device that is converted into usable electricity. Improving this conversion efficiency is a key goal of research and helps make PV technologies cost-competitive with conventional sources of energy.
Hao Seal Tech. As a professional sealing ring manufacturer, we have an unyielding commitment to excellence. We hold ourselves accountable for producing high-quality sealing components, striving to be the most reliable and critical part in every application.
High-Temperature Diffusion,
Oxidation Equipment Sealing solutions
1. High temperature resistance, with the equipment operating at temperatures from 900 to 1050°C, required extremely high service life for the sealing rings;
2. Low compression set rate, high strength; suitable for vacuum sealing;
3. A small amount of acidic gas (corrosive);
4. No water cooling at the furnace door position, adopting the solution of perfluorinated rubber resistant to high temperatures. The sealing rings can operate at high temperatures above 300°C for a long time;
ALD Small Cavities Sealing Solutions
1. The temperature at the sealing position has exceeded 300°C for a long time without water cooling device;
2. The sealing cavity needs to be opened and closed frequently, so the sealing ring must be abrasive resistance;
3. The structural design of the sealing ring is square, which is difficult to install, and the rounded corner positions are prone to cracking;
4. Hao-O Sealing adopts the special high-temperature resistant formula of FFKM perfluoroelastomer. The material has high strength and good compression set rate, with abrasive resistance , impact-resistant, and high-temperature-resistant, ensuring the service life of the equipment and reducing the maintenance frequency
Technical Requirements for Sealing Rings of ALD Small Cavities
1. The material is VITON-B brown, with hig-temperature-resistant, high strength and good elasticity;
2. The mold is precision-manufactured to ensure the high dimensional accuracy of the sealing ring, enabling precise assembly with the aluminum plate and good sealing effect;
3. Hao-O Sealing has a full range of specifications with stocks and fast delivery With: 127*127; 135*127 and other sizes;
Magnetic Fluid O-Ring for ALD Mainframe,
Automated Transfer O-Ring Sealing
1. The material is VITON-A Black, with high-temperature-resistant, high strength and good elasticity;
2. The material has excellent wear resistance and does not release gases or solid particles during operation;
3. With all typesand specifications in Technical Requirements: stocks and fast delivery.
HJT Equipment and Super-Large Hot Wire CVD Equipments Sealing Solutions
1. Hao-O Sealing has developed the VITON-A black formula, with low compression set rate and high strength and good for vacuum sealing;
2. Operating temperature below 200°C, with relatively low corrosiveness;
3. For HJT plate-type equipment, the cavity size is large, and the size is extremely large, with the maximum inner diameter exceeding 3 meters;
4. Hao-O Sealing adopts advanced segmented vulcanization technology. The product is formed as a whole ring without joints, ensuring product stability and long-life sealing;
5. Hao-O Sealing has developed a full range of molds.We accept customized with non-standard size and small quantity.
